SYSTEM AND METHOD FOR SCHEDULING THE MOVEMENT OF WAFERS IN A WAFER-PROCESSING TOOL

Title:

SYSTEM AND METHOD FOR SCHEDULING THE MOVEMENT OF WAFERS IN A WAFER-PROCESSING TOOL

Document Type and Number:

WIPO Patent Application WO2002088859

Kind Code:

A3

Abstract:

In a system and method for scheduling the movement of wafers in a wafer-processing tool (100), the wafer-processing tool (100) can include a load module (102), a wafer-transfer unit (104), a process module (116), and a scheduler (118). The scheduler (118) can be configured to generate a schedule for the movement of wafers in the wafer-processing tool (100) based on the duration of the operations to be performed by the wafer-transfer unit (104) and the process module (116) in processing the wafers.

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Inventors:

JOMA KENTARO (US)
OGI TATSUYA (US)

Application Number:

PCT/US2002/012964

Publication Date:

September 25, 2003

Filing Date:

April 26, 2002

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
JOMA KENTARO (US)
OGI TATSUYA (US)

International Classes:

G05B19/418; (IPC1-7): G05B19/418

Foreign References:

US5801945A	1998-09-01
EP0837494A2	1998-04-22

Other References:

LEBARON H T ET AL: "The Simulation Of Cluster Tools: A New Semconductor Manufacturing Technology", PROCEEDINGS OF THE WINTER SIMULATION CONFERENCE (WSC). LAKE BUENA VISTA, DEC. 11 - 14, 1994, NEW YORK, IEEE, US, 11 December 1994 (1994-12-11), pages 907 - 912, XP010305947, ISBN: 0-7803-2109-X

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