Title:
SYSTEM FOR WAFER-LEVEL PHOSPHOR DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2012/078530
Kind Code:
A9
Abstract:
System for wafer-level phosphor deposition. A method for phosphor deposition on a semiconductor wafer that has a plurality of LED dies includes the operations of covering the semiconductor wafer with a selected thickness of photo resist material, removing portions of the photo resist material to expose portions of the semiconductor wafer so that electrical contacts associated with the plurality of LED dies remain unexposed, and depositing phosphor on the exposed portions of the semiconductor wafer.
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Inventors:
XU TAO (US)
Application Number:
PCT/US2011/063345
Publication Date:
November 22, 2012
Filing Date:
December 05, 2011
Export Citation:
Assignee:
BRIDGELUX INC (US)
XU TAO (US)
XU TAO (US)
International Classes:
H01L21/66
Attorney, Agent or Firm:
WU, James, M. (84 W. Satna Clara StreetSuite 82, San Jose CA, US)
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