Title:
TARGET ASSEMBLY AND X-RAY MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2022/223055
Kind Code:
A1
Abstract:
A target assembly(1) and an X-ray microscope. The target assembly(1) includes a first section(101) including a first heat dissipating layer(3), in which the first heat dissipating layer(3) is provided with a first groove(301), a first target(2) is arranged in the first groove(301), the first target(2) is provided with a first action surface(201) that is configured to be acted by an electron beam(9), and the first action surface(201) is arranged to be inclined with respect to a bottom surface of the first groove(301). The target assembly(1) and the X-ray microscope increase the X-ray density in an effective irradiation area, and the imaging quality of the X-ray microscope is improved.
Inventors:
LI SHUAI (CN)
QU SHIZUO (CN)
KOU HUIMIN (CN)
QU SHIZUO (CN)
KOU HUIMIN (CN)
Application Number:
PCT/CN2022/100890
Publication Date:
October 27, 2022
Filing Date:
June 23, 2022
Export Citation:
Assignee:
FOCUS E BEAM TECH PTE LTD (SG)
International Classes:
G01N23/04; H01J35/12
Domestic Patent References:
| WO2019074548A1 | 2019-04-18 |
Foreign References:
| CN114324414A | 2022-04-12 | |||
| CN216160492U | 2022-04-01 | |||
| US20130108012A1 | 2013-05-02 | |||
| US20110135066A1 | 2011-06-09 | |||
| US20140270071A1 | 2014-09-18 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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