Title:
TEMPERATURE CHARACTERISTIC SETTING METHOD FOR ANGULAR VELOCITY SENSOR, AND ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2007/125708
Kind Code:
A1
Abstract:
Provided is a method for setting the temperature characteristics of an angular
velocity sensor, by determining the temperature characteristics of a detuned
frequency or the difference between the oscillation frequency of an oscillating
circuit including a piezoelectric vibrator (31) and the frequency of the electromotive
force of the piezoelectric vibrator due to a Coriolis force, by determining the
relation of a sensitivity to the detuned frequency, by determining the temperature
characteristics of the detected phase or the difference between the Coriolis
signal phase or the phase angle of the electromotive signal and an oscillated
signal phase, by determining a relation of the sensitivity to the detected phase,
and by deciding the shift of the detected phase so that the sensitivity change
to the temperature change on the detuned frequency may be suppressed with the
sensitivity change to the temperature change on the detected phase.
Inventors:
SUGIBAYASHI HIDEAKI (JP)
Application Number:
PCT/JP2007/056352
Publication Date:
November 08, 2007
Filing Date:
March 27, 2007
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
SUGIBAYASHI HIDEAKI (JP)
SUGIBAYASHI HIDEAKI (JP)
International Classes:
G01C19/56; H01L41/08
Foreign References:
| JP2002107148A | 2002-04-10 | |||
| JP2005274537A | 2005-10-06 | |||
| JPH07128074A | 1995-05-19 |
Attorney, Agent or Firm:
KOMORI, Hisao (Noninbashi Chuo-ku, Osaka-sh, Osaka 11, JP)
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