Title:
TEMPERATURE VARYING DEVICE AND TEMPERATURE VARYING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/037610
Kind Code:
A1
Abstract:
This temperature varying device has exceptional temperature distribution uniformity and cleanliness stability and is suitable for temperature cycling. The temperature varying device has a housing (10) that demarcates a closed space (10a) that is cut off from outside air and a high-temperature stage (30) and low-temperature stage (40) provided in the closed space (10a). The high-temperature stage (30) carries out temperature adjustment such that a temperature-adjusted surface (31) is kept at a first target temperature, and the low-temperature stage (40) carries out temperature adjustment such that a temperature-adjusted surface (41) is kept at a second target temperature lower than the first target temperature. The temperature varying device is further provided with a movement mechanism (50) for moving an object under test between a processing position at which the object under test is in contact with or opposes the temperature-adjusted surface of the high-temperature stage (30) and a processing position at which the object under test is in contact with or opposes the temperature-adjusted surface (41) of the low-temperature stage (40).
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Inventors:
LI YISONG (JP)
KAMIKAWA KEIJI (JP)
KAMIKAWA KEIJI (JP)
Application Number:
PCT/JP2017/013016
Publication Date:
March 01, 2018
Filing Date:
March 29, 2017
Export Citation:
Assignee:
KYUSHU NISSHO CO LTD (JP)
International Classes:
G01N25/00; F27B17/00; F27D7/06; G01R31/26; H01L21/66
Foreign References:
| JP2002033364A | 2002-01-31 | |||
| JPS62169063A | 1987-07-25 | |||
| JP2007081022A | 2007-03-29 | |||
| JPS59228176A | 1984-12-21 | |||
| US6113262A | 2000-09-05 |
Attorney, Agent or Firm:
FUJIMOTO Kenji (JP)
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