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Title:
TEMPLATE PROCESSING METHOD, COMPUTER STORAGE MEDIUM, TEMPLATE PROCESSING APPARATUS, AND IMPRINTING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/111359
Kind Code:
A1
Abstract:
In this template processing method, the front surface of a template is cleaned by removing a mold-release film formed on a transfer pattern on the front surface of the template. The front surface of the template is cleaned by supplying a cleaning liquid to the mold-release film from the front surface side of the template, while applying ultraviolet to the mold-release film on the front surface of the template from the rear surface side of the template. The ultraviolet and the cleaning liquid are supplied from different directions.

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Inventors:
NISHI TAKANORI (JP)
TERADA SHOICHI (JP)
HIROSHIRO KOUKICHI (JP)
MATSUDA HIROMITSU (JP)
KITANO TAKAHIRO (JP)
Application Number:
PCT/JP2012/050251
Publication Date:
August 23, 2012
Filing Date:
January 10, 2012
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
NISHI TAKANORI (JP)
TERADA SHOICHI (JP)
HIROSHIRO KOUKICHI (JP)
MATSUDA HIROMITSU (JP)
KITANO TAKAHIRO (JP)
International Classes:
H01L21/027; B29C33/68; B29C33/72
Foreign References:
JP2011005696A2011-01-13
JP2011005695A2011-01-13
JP2011009362A2011-01-13
JP2010046923A2010-03-04
JP2011000806A2011-01-06
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
Tetsuo Kanamoto (JP)
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