Title:
TERMINAL DEVICE AND RF POWER SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/181852
Kind Code:
A1
Abstract:
Provided are a terminal device and an RF power supply device that can intuitively and easily display the status information on the RF power supply in a process and can easily determine whether the state is good or bad and whether adjustment is necessary. Since a terminal device 14 connected to RF power supplies 10 displays, regarding status information, the powers of the traveling waves and the reflected waves of the plurality of RF power supplies 10 in bar graphs on a frequency base screen, and displays the phase of each RF power supply in a color-coded bar graph, the terminal device and the RF power supply device can recognize the status information that is intuitive and ease to understand, mainly for the frequency of each RF power supply as well as the phase thereof.
Inventors:
TAKAHASHI NAOTO (JP)
OSHIDA YOSHIYUKI (JP)
FUJIMOTO NAOYA (JP)
OSHIDA YOSHIYUKI (JP)
FUJIMOTO NAOYA (JP)
Application Number:
PCT/JP2021/000360
Publication Date:
September 16, 2021
Filing Date:
January 07, 2021
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC (JP)
International Classes:
H05H1/46; G06F1/26; G06F3/14; H03H7/38
Foreign References:
| JP2006253364A | 2006-09-21 | |||
| JP2008092680A | 2008-04-17 | |||
| JP2008311580A | 2008-12-25 |
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