Title:
TESTING APPARATUS AND TESTING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/234048
Kind Code:
A1
Abstract:
A testing apparatus for testing a testing target device, wherein: the testing target device is formed on a testing target body, and is a backside-illumination type imaging device which light is input into from a backside, which is the surface on the reverse side thereof from a side provided with a wiring layer; the testing apparatus comprises a placement stand that supports the testing target body while facing the backside of the imaging device; the placement stand has a transparent placement surface that the testing target body is placed on, and a radiation unit that is disposed below the placement surface and that radiates light toward the testing target body placed on the placement surface; the radiation unit has a light-guiding plate having a facing surface that faces the testing target body while sandwiching the placement surface between the light-guiding plate and the testing target body, and a light source unit that is provided to a region laterally outside from the light-guiding plate and that emits light toward a lateral edge surface of the light-guiding plate; the light-guiding plate emits light that is emitted from the light source unit and input from the lateral edge surface of the light-guiding plate toward the placement surface from the facing surface; the placement surface further has an optical member that transmits light approaching the testing target body placed on the placement surface from the facing surface of the light-guiding plate; and the optical member is subdivided into a plurality of regions, with the light transmittance being configured variably per each of the regions.
Inventors:
NAKAYAMA HIROYUKI (JP)
Application Number:
PCT/JP2023/018575
Publication Date:
December 07, 2023
Filing Date:
May 18, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66
Foreign References:
| JP2020068333A | 2020-04-30 | |||
| JPH1153923A | 1999-02-26 | |||
| JPH09250908A | 1997-09-22 | |||
| JP2019106491A | 2019-06-27 | |||
| JP2020077716A | 2020-05-21 | |||
| JP2009170730A | 2009-07-30 | |||
| JP2020068329A | 2020-04-30 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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