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Title:
INSPECTION APPARATUS AND MOUNTING BASE
Document Type and Number:
WIPO Patent Application WO/2023/234049
Kind Code:
A1
Abstract:
Provided is an inspection apparatus for inspecting a device to be inspected. The device to be inspected is a back-illuminated imaging device in which light is incident from a back surface that is on the opposite side from the side on which a wiring layer is provided, and is formed on an inspection target body. The inspection apparatus comprises a mounting base that supports the inspection target body in a manner such that the inspection target body faces the back surface of the imaging device. The mounting base has a top plate that is made of an optically transparent material and that has a mounting surface on which the inspection target body is mounted, an irradiation unit that is provided at a position opposite from the inspection target body with the top plate therebetween and that emits light toward the inspection target body mounted on the mounting surface, and a temperature adjustment unit that adjusts the temperature of the device to be inspected of the inspection target body mounted on the mounting surface. In the top plate, a pattern which comprises a metal material and which is of a thickness that transmits light is formed in the mounting surface and/or the surface on the opposite side from the mounting surface.

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Inventors:
KASAI SHIGERU (JP)
AKIYAMA NAOKI (JP)
TAKASE FUMIYA (JP)
NAKAYAMA HIROYUKI (JP)
KUMASAKA HAJIME (JP)
Application Number:
PCT/JP2023/018576
Publication Date:
December 07, 2023
Filing Date:
May 18, 2023
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01R31/26
Foreign References:
JP2020077716A2020-05-21
JP2001281069A2001-10-10
JP2022038076A2022-03-10
JP2020068333A2020-04-30
JP2016009752A2016-01-18
JP2016152408A2016-08-22
JP2020068329A2020-04-30
JP2009170730A2009-07-30
JP2021132190A2021-09-09
JPS597345A1984-01-14
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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