Title:
TESTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/171932
Kind Code:
A1
Abstract:
This testing device for testing an electronic device by causing contact terminals to electrically contact the electronic device, comprises: a placement stage formed with a light-transmitting member opposite the side on which a test object is placed and having therein a coolant flow path through which a coolant capable of transmitting light flows; a light irradiation mechanism disposed so as to face the surface opposite the test object placement side of the placement stage, and having a plurality of LEDs pointing toward the test object; and a control unit controlling the absorption of heat by the coolant and the heating by the lights from the LEDs, to control the temperature of the tested electronic device. The control unit controls the light output from the LEDs on the basis of the measured temperature of the tested electronic device and controls the absorption of heat by the coolant on the basis of the LED light output.
Inventors:
KASAI SHIGERU (JP)
KOBAYASHI MASAHITO (JP)
KOBAYASHI MASAHITO (JP)
Application Number:
PCT/JP2019/005988
Publication Date:
September 12, 2019
Filing Date:
February 19, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01R31/26; G01R31/28; H01L21/26; H01L21/683
Domestic Patent References:
| WO2017003868A1 | 2017-01-05 |
Foreign References:
| JP2004140296A | 2004-05-13 | |||
| JP2015056624A | 2015-03-23 | |||
| JP2013008752A | 2013-01-10 | |||
| JP2012191158A | 2012-10-04 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
Download PDF:
Previous Patent: CONTAINER FOR HOUSING HOUSEHOLD TISSUE PAPER
Next Patent: OPTICAL WAVEGUIDE CONNECTION STRUCTURE
Next Patent: OPTICAL WAVEGUIDE CONNECTION STRUCTURE