Title:
THERMOPILE INFRARED SENSOR AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2013/168708
Kind Code:
A1
Abstract:
[Problem] The purpose of the present invention is to provide a thermopile infrared sensor and a method for manufacturing same, in which sensitivity can be improved and the formation of an infrared-absorbing film that covers the cold junction is prevented. [Solution] A thermopile infrared sensor (10) having a substrate (11), a thermopile element (30), and an infrared-absorbing film (21), having the thermopile element (30) and the infrared-absorbing film (21) formed on the substrate (11), and having a temperature difference that can be detected between the heat junction (34) and the cold junction (35) of the thermopile element (30), wherein a range-restricting member (20) for restricting the formation range of the infrared-absorbing film (21) is formed between the infrared-absorbing film (21) and the cold junction (35).
Inventors:
OZAKI KYOSUKE (JP)
WATABE KOYA (JP)
WAGA SATOSHI (JP)
WATABE KOYA (JP)
WAGA SATOSHI (JP)
Application Number:
PCT/JP2013/062842
Publication Date:
November 14, 2013
Filing Date:
May 07, 2013
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD (JP)
International Classes:
G01J1/02; G01J5/12
Foreign References:
| JP2006214758A | 2006-08-17 | |||
| JPH0543037U | 1993-06-11 | |||
| JP2006071601A | 2006-03-16 | |||
| JP2005283482A | 2005-10-13 | |||
| JP2009128306A | 2009-06-11 | |||
| JP2008196955A | 2008-08-28 |
Attorney, Agent or Firm:
NOZAKI, Teruo et al. (JP)
Teruo Nozaki (JP)
Teruo Nozaki (JP)
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