Title:
THICKNESS MEASURING METHOD, X-RAY ANALYSIS DEVICE, INFORMATION PROCESSING DEVICE, AND COMPUTER PROGRAM
Document Type and Number:
WIPO Patent Application WO/2024/004990
Kind Code:
A1
Abstract:
Provided are a thickness measuring method, an X-ray analysis device, an information processing device, and a computer program that can measure the thicknesses of more multilayer samples as compared to conventional means. This thickness measuring method comprises: irradiating a sample including a first layer and a second layer which are laminated, with X-rays such that the X-rays transmit through the first layer and the second layer in the stated order; detecting fluorescent X-rays generated from the first layer; detecting transmitting X-rays that have transmitted through the sample; identifying the density of the first layer and the absorption coefficient of X-rays at the first layer through elementary analysis based on the fluorescent X-rays; and calculating the thickness of the first layer on the basis of the absorption coefficient and the density, and the intensities of the transmitting X-rays at two different energies.
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Inventors:
OHASHI SATOSHI (JP)
MIYAMOTO SHOHEI (JP)
AOYAMA TOMOKI (JP)
MIYASAKA SHINTARO (JP)
NAGURA MAKOTO (JP)
HIROSE JUN (JP)
MATSUNAGA DAISUKE (JP)
MIYAMOTO SHOHEI (JP)
AOYAMA TOMOKI (JP)
MIYASAKA SHINTARO (JP)
NAGURA MAKOTO (JP)
HIROSE JUN (JP)
MATSUNAGA DAISUKE (JP)
Application Number:
PCT/JP2023/023738
Publication Date:
January 04, 2024
Filing Date:
June 27, 2023
Export Citation:
Assignee:
HORIBA LTD (JP)
International Classes:
G01B15/02; G01N23/087; G01N23/223
Foreign References:
JPS6138509U | 1986-03-11 | |||
JPS6391506A | 1988-04-22 | |||
JPH0394444A | 1991-04-19 |
Attorney, Agent or Firm:
KOHNO, Hideto et al. (JP)
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