Title:
THIN-FILM BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/254343
Kind Code:
A1
Abstract:
Provided are a thin-film bulk acoustic wave resonator and a manufacturing method therefor. The thin-film bulk acoustic wave resonator comprises: a first substrate, which is provided with a first cavity, and a piezoelectric stacked structure, which covers the first cavity, wherein the piezoelectric stacked structure comprises a first electrode, a piezoelectric layer and a second electrode, which are successively arranged on the first substrate from bottom to top; the first electrode comprises a first electrode resonance part, which is located in an effective resonance area, and a first electrode lead-out part, which extends outside the first cavity; a connection between the first electrode lead-out part and the first electrode resonance part protrudes away from the piezoelectric layer so as to form a first gap; the first electrode resonance part is located in the first cavity; the second electrode comprises a second electrode resonance part, which is located in the effective resonance area, and a second electrode lead-out part, which extends outside the first cavity, and a connection of the second electrode lead-out part and the second electrode resonance part protrudes away from the piezoelectric layer so as to form a second gap; and the second electrode resonance part is located in the first cavity. The quality factor of a thin-film bulk acoustic wave resonator can be improved, thereby improving the performance of a device.
Inventors:
HUANG HERB HE (CN)
Application Number:
PCT/CN2021/100172
Publication Date:
December 23, 2021
Filing Date:
June 15, 2021
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H3/02
Foreign References:
| CN112039467A | 2020-12-04 | |||
| CN112039469A | 2020-12-04 | |||
| CN112039471A | 2020-12-04 | |||
| CN110166018A | 2019-08-23 | |||
| CN111010138A | 2020-04-14 | |||
| CN110635775A | 2019-12-31 |
Attorney, Agent or Firm:
BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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