THIN-FILM BULK ACOUSTIC WAVE RESONATOR AND METHOD FOR MANUFACTURE THEREOF AND FILTER - NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH

Title:

THIN-FILM BULK ACOUSTIC WAVE RESONATOR AND METHOD FOR MANUFACTURE THEREOF AND FILTER

Document Type and Number:

WIPO Patent Application WO/2022/057769

Kind Code:

A1

Abstract:

Disclosed are a thin-film bulk acoustic wave resonator and method for manufacture thereof and filter, the acoustic wave resonator comprising: a piezoelectric stack structure, said piezoelectric stack structure comprising a first electrode, a piezoelectric layer, and a second electrode, stacked in sequence from bottom to top; at least one of said first electrode and said second electrode comprises an annular arched bridge projecting in the direction away from the surface of said piezoelectric layer, the inner surface of said arched bridge enclosing an annular void, the area enclosed by said annular void being the effective resonant region of the resonator. In the present invention, the boundary of the effective resonant region is defined by the area where the arched bridge is located, and the ends of the first electrode and/or the second electrode at the boundary of the effective resonant region are caused to be in contact with gas in the void, thus the effect of eliminating the boundary clutter of the electrode in the effective resonant region is achieved, and the Q value of the resonator is increased.

More Like This:

JPH08330888	CERAMIC RESONATOR
JP2012205258	POLISHING METHOD, METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT AND ELECTRIC WAVE CLOCK

Inventors:

HUANG HERB HE (CN)

Application Number:

PCT/CN2021/118000

Publication Date:

March 24, 2022

Filing Date:

September 13, 2021

Export Citation:

Click for automatic bibliography generation Help

Assignee:

NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)

International Classes:

H03H3/02; H03H9/00; H03H9/02; H03H9/13; H03H9/205; H03H9/58

Foreign References:

CN110868177A	2020-03-06
CN110868170A	2020-03-06
CN110868174A	2020-03-06
CN110166014A	2019-08-23
CN111193485A	2020-05-22

Attorney, Agent or Firm:

BEIJING SICHUANG DACHENG INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)

Download PDF:

View/Download PDF PDF Help

Previous Patent: MANUFACTURING METHOD FOR THIN FILM BULK ACOUSTIC WAVE RESONATOR

Next Patent: PHARMACEUTICAL COMPOUND USED AS JAK KINASE INHIBITOR