THIN FILM FORMING METHOD, DISPLAY, AND COLOR FILTER

Title:

THIN FILM FORMING METHOD, DISPLAY, AND COLOR FILTER

Document Type and Number:

WIPO Patent Application WO/1999/048338

Kind Code:

A1

Abstract:

A method for forming a thin film comprises repeating the step of forming an affinity bank layer (111-11n) of a material (inorganic material such as SiO¿2?) exhibiting an affinity with a thin film material liquid (130) and the step of forming a nonaffinity bank layer (121-12n) of a material (organic material such as resist) exhibiting a nonaffinity with the thin film material liquid (130) so as to form a bank (110) of alternate affinity bank layers and nonaffinity bank layers, filling the space between the banks with the thin film material liquid (130) by an ink-jet method, and performing heat treatment so as to form thin film layers (131-13n) in order. By performing the steps, the cost necessary for affinity control is reduced, and a multilayer thin film with a uniform thickness is formed.

Inventors:

YUDASAKA ICHIO (JP)

Application Number:

PCT/JP1999/001289

Publication Date:

September 23, 1999

Filing Date:

March 16, 1999

Export Citation:

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Assignee:

SEIKO EPSON CORP (JP)
YUDASAKA ICHIO (JP)

International Classes:

G09F9/30; C30B29/64; G02B5/20; G02B5/22; G02F1/1335; H01L27/32; H01L51/05; H01L51/40; H01L51/50; H05B33/10; H01L51/56; (IPC1-7): H05B33/22; H05B33/10; G02B5/20; G02B5/101; G09F9/00; G09F9/321

Foreign References:

JPH09230129A	1997-09-05
JPH09258208A	1997-10-03
JPH09127327A	1997-05-16
JPH07234314A	1995-09-05
JPH10153967A	1998-06-09
JPH05347188A	1993-12-27

Other References: