Title:
THREAD GROOVE PUMP MECHANISM, VACUUM PUMP USING THIS THREAD GROOVE PUMP MECHANISM, AND ROTOR, OUTER-CIRCUMFERENTIAL STATOR, AND INNER-CIRCUMFERENTIAL STATOR USED IN THIS THREAD SCREW PUMP MECHANISM
Document Type and Number:
WIPO Patent Application WO/2015/045748
Kind Code:
A1
Abstract:
Provided is a thread groove pump mechanism with which the reverse flow of gas in the thread groove pump mechanism is suppressed, a pressure difference in the pump-diameter direction near the outlet of the thread groove pump mechanism is reduced, and the exhaust performance and compression performance are improved. Also provided are a vacuum pump using this thread groove pump mechanism, and a rotor, an outer-circumferential stator, and an inner-circumferential stator used in this thread screw pump mechanism. The thread groove pump mechanism (PB) is equipped with: outer-circumferential thread groove parts (71) engraved in the surface of an outer-circumferential stator (70) that is the surface opposing a rotor cylinder part (45); inner-circumferential thread groove parts (81) engraved in the surface of an inner-circumferential stator (80) that is the surface opposing the rotor cylinder part (45); and an exhaust performance improvement means.
Inventors:
SAKAGUCHI YOSHIYUKI (JP)
WADA AKIHIKO (JP)
KABASAWA TAKASHI (JP)
WADA AKIHIKO (JP)
KABASAWA TAKASHI (JP)
Application Number:
PCT/JP2014/072913
Publication Date:
April 02, 2015
Filing Date:
September 01, 2014
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2012043035A1 | 2012-04-05 |
Foreign References:
| JP2003028090A | 2003-01-29 | |||
| JPH046593U | 1992-01-21 | |||
| JP2003065281A | 2003-03-05 | |||
| JP2003172289A | 2003-06-20 | |||
| JPH0538389U | 1993-05-25 | |||
| JPH0538389U | 1993-05-25 |
Other References:
See also references of EP 3054165A4
Attorney, Agent or Firm:
HAYASHI TAKAYOSHI (JP)
Wood Kokichi (JP)
Wood Kokichi (JP)
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