Title:
THREE-AXIS MEMS GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2020/045917
Kind Code:
A1
Abstract:
Provided is an integrated three-axis MEMS gyroscope which can be implemented as a single package and sense rotation around all three axes. The three-axis MEMS gyroscope comprises: a first verification mass for sensing rotation input in the direction of a first axis on a plane; a second verification mass for sensing rotation input in the direction of a second axis which is on the plane and orthogonal to the first axis; a third verification mass for sensing rotation input in the direction of a third axis which is orthogonal to the plane; an excitation electrode which excites at least one among the first to third verification masses in an operation mode; a sensing electrode which senses the displacements of the first to third verification masses which occurs in a sensing mode due to Coriolis forces; and a central link mechanism arranged in the center of the three-axis MEMS gyroscope, and structurally connected to the first to third verification masses so as to support, in an antiphase manner, both the movements of the first to third verification masses in the operation mode and the movements of the first to third verification masses in the sensing mode.
Inventors:
SONG CI MOO (KR)
JUNG KYU DONG (KR)
SHAH MUHAMMAD ALI (KR)
AHN JAE HYUN (KR)
LEE SANG WOO (US)
YOUN KEUN JUNG (KR)
KIM YONG KOOK (KR)
TRAN LUAN CONG (US)
JUNG KYU DONG (KR)
SHAH MUHAMMAD ALI (KR)
AHN JAE HYUN (KR)
LEE SANG WOO (US)
YOUN KEUN JUNG (KR)
KIM YONG KOOK (KR)
TRAN LUAN CONG (US)
Application Number:
PCT/KR2019/010837
Publication Date:
March 05, 2020
Filing Date:
August 26, 2019
Export Citation:
Assignee:
SHIN SUNG C&T CO LTD (KR)
International Classes:
B81B7/02; G01C19/56
Foreign References:
| KR101577155B1 | 2015-12-11 | |||
| KR20170004120A | 2017-01-11 | |||
| US20180038692A1 | 2018-02-08 | |||
| KR20150124349A | 2015-11-05 | |||
| US8789416B2 | 2014-07-29 |
Attorney, Agent or Firm:
KASAN IP & LAW FIRM (KR)
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