Title:
THREE-DIMENSIONAL MEASUREMENT DEVICE AND THREE-DIMENSIONAL MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2020/250571
Kind Code:
A1
Abstract:
Provided are a three-dimensional measurement device and a three-dimensional measurement method that can speed up measurement when performing three-dimensional measurement using a phase shift method. A substrate inspection device 1 comprises: an illumination device 4 that irradiates a predetermined optical pattern on a printed board 2 from diagonally above; a camera 5 that captures an image of an irradiated portion of the optical pattern on the printed board 2; and a control device 6 that controls the devices. The control device 6 changes the phase of the irradiated optical pattern in four ways, captures an image under each of the optical patterns having different phases, and acquires four types of image data. When performing the three-dimensional measurement by means of the phase shift method on the basis of these four types of image data, 2-4 luminance values that are not overexposed and not blacked out are extracted from among four luminance values related to a predetermined coordinate position on the image data, and the height of the predetermined coordinate position can be measured on the basis of the extracted values.
Inventors:
OKUDA MANABU (JP)
OHYAMA TSUYOSHI (JP)
SAKAIDA NORIHIKO (JP)
OHYAMA TSUYOSHI (JP)
SAKAIDA NORIHIKO (JP)
Application Number:
PCT/JP2020/017212
Publication Date:
December 17, 2020
Filing Date:
April 21, 2020
Export Citation:
Assignee:
CKD CORP (JP)
International Classes:
G01B11/25
Foreign References:
| JP2016211986A | 2016-12-15 | |||
| JP2010281778A | 2010-12-16 | |||
| JP2005214653A | 2005-08-11 | |||
| JP2003279329A | 2003-10-02 | |||
| US7525669B1 | 2009-04-28 |
Attorney, Agent or Firm:
KAWAGUCHI Mitsuo (JP)
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