THREE-DIMENSIONAL STRUCTURAL BODY COMPOSED OF SILICON FINE WIRE, ITS MANUFACTURING METHOD, AND DEVICE USING SAME

Title:

THREE-DIMENSIONAL STRUCTURAL BODY COMPOSED OF SILICON FINE WIRE, ITS MANUFACTURING METHOD, AND DEVICE USING SAME

Document Type and Number:

WIPO Patent Application WO/2003/102549

Kind Code:

A1

Abstract:

A highly-reliable three-dimensional structural body composed of a micro silicon fine wire, a method for manufacturing the three-dimensional structural body, and a device using the same. The three-dimensional structural body comprises a wire (2) of the order of nanometers to micrometers formed by wet-etching using the crystallinity of a single crystal material.

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Inventors:

KAWAKATSU HIDEKI (JP)
KOBAYASHI DAI (JP)

Application Number:

PCT/JP2003/006929

Publication Date:

December 11, 2003

Filing Date:

June 02, 2003

Export Citation:

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Assignee:

JAPAN SCIENCE & TECH CORP (JP)
KAWAKATSU HIDEKI (JP)
KOBAYASHI DAI (JP)

International Classes:

B01J20/28; B81B1/00; B81C1/00; B82B1/00; B82B3/00; G01K7/16; G01L1/10; G01N1/00; G01Q30/10; G01Q30/20; G01Q60/24; G01Q60/38; G01G3/16; G01Q60/54; G01R33/02; (IPC1-7): G01N13/16; G01R33/02; G01B21/00; G12B21/08; G01K7/16; B82B3/00; B01D39/06; B01D39/20; B01J20/28; G01L1/10; G02B5/18; G02B5/28

Foreign References:

JPH0618257A	1994-01-25
JPH11515092A	1999-12-21
JPH08506857A	1996-07-23
JP2001004455A	2001-01-12
US20010019029A1	2001-09-06
US5171992A	1992-12-15
JPH05234984A	1993-09-10
JPH0583487A	1993-04-02
US5856967A	1999-01-05
US5399415A	1995-03-21
JPH0894647A	1996-04-12
JP2001091441A	2001-04-06

Other References:

MASAYOSHI ERI: "Shin sensing gijutsu o mezashite dai 8 kai microsensor", KEISOKU TO SEIGYO, vol. 36, no. 11, November 1997 (1997-11-01), pages 808 - 817, XP002972350
NORMAND P. ET AL.: "Fabrication of si nano-wires using anisotropic dry and wet etching", MICROELECTRONIC ENGINEERING, vol. 41/42, 1998, pages 551 - 554, XP004111779
HSIN-HWA HU ET AL.: "The diagnostic micromachined beams on (1 1 1) substrate", SENSORS AND ACTUATORS A, vol. 93, 2001, pages 258 - 265, XP004298779
See also references of EP 1510806A4

Attorney, Agent or Firm:

Shimizu, Mamoru (7-10 Kanda-mitoshiro-ch, Chiyoda-ku Tokyo, JP)

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