Title:
TIME-OF-FLIGHT MASS SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2021/193574
Kind Code:
A1
Abstract:
The present invention provides a time-of-flight mass spectrometer of an orthogonal acceleration method capable of reducing an ion energy distribution of an acceleration direction and acquiring high resolution. This time-of-flight mass spectrometer is provided with: an ion guide that guides ions emitted from an ion source; an electrostatic lens that includes a plurality of electrodes; an ion beam parallelization mechanism for parallelizing ion beams emitted from the electrostatic lens; an orthogonal acceleration unit that accelerates the ion beams emitted from the ion beam parallelization mechanism in a direction orthogonal to an incident axis; a reflectron including a reflector that reflects the ions emitted from the orthogonal acceleration unit; and a detector that detects the ions entering from the reflectron.
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Inventors:
SHISHIKA TSUKASA (JP)
TERUI YASUSHI (JP)
TERUI YASUSHI (JP)
Application Number:
PCT/JP2021/011807
Publication Date:
September 30, 2021
Filing Date:
March 22, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J49/40
Domestic Patent References:
| WO2014203305A1 | 2014-12-24 |
Foreign References:
| JPH07260765A | 1995-10-13 | |||
| GB2567794A | 2019-05-01 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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