Title:
TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2023/135853
Kind Code:
A1
Abstract:
This transducer comprises a base portion (110), and a plurality of beam portions. The base portion (110) is frame-shaped. Each of the plurality of beam portions extends from above the base portion (110) toward an inner side of the base portion (110), while having an edge portion that follows along a slit (142). Each of the plurality of beam portions includes an upper electrode (140) and a lower electrode (150) that face one another across a piezoelectric layer (130). The piezoelectric layer (130) overhangs the lower electrode (150) at the edge portions of each of the plurality of beam portions.
Inventors:
NIWA RYOSUKE (JP)
IKEUCHI SHINSUKE (JP)
MATSUBARA HIROSHI (JP)
CHATANI MUNEHITO (JP)
IKEUCHI SHINSUKE (JP)
MATSUBARA HIROSHI (JP)
CHATANI MUNEHITO (JP)
Application Number:
PCT/JP2022/032400
Publication Date:
July 20, 2023
Filing Date:
August 29, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H04R17/00
Domestic Patent References:
| WO2020121609A1 | 2020-06-18 | |||
| WO2021251159A1 | 2021-12-16 |
Foreign References:
| JPH07274288A | 1995-10-20 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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