Title:
TRANSFER DEVICE AND SUBSTRATE TREATMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2014/024797
Kind Code:
A1
Abstract:
A transfer device is provided with: a plate holding part for holding a transfer plate having a porous plate formed from a porous material with a predetermined thickness and a transfer pattern layer formed on one surface side of the porous plate; an object holding part for holding an object to which the pattern layer of the transfer plate can be transferred in close contact with or in proximity to one surface of the transfer plate; and a fluid supply part for supplying a fluid with a predetermined pressure from the other surface side to the one surface side of the porous plate.
Inventors:
SUZUKI TOMONARI (JP)
Application Number:
PCT/JP2013/071006
Publication Date:
February 13, 2014
Filing Date:
August 02, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B41F17/10; B41F17/14; B41M1/26; H01L51/50; H05B33/10
Foreign References:
| JP2004209819A | 2004-07-29 | |||
| JP2000043238A | 2000-02-15 | |||
| JP2006302814A | 2006-11-02 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
Download PDF: