Title:
TRANSFER MOLD AND METHOD FOR PRODUCING TRANSFER MOLD
Document Type and Number:
WIPO Patent Application WO/2010/140648
Kind Code:
A1
Abstract:
Disclosed is a transfer mold which is capable of transferring a fine pattern and suitable for a large-area transfer. Also disclosed is a method for producing a transfer mold. The transfer mold comprises a roll body that has a generally cylindrical shape, a surface layer (3) that is formed on the outer circumferential surface of the roll body, and a fine structure layer that is formed on the surface layer (3). The transfer mold is characterized in that the surface layer (3) is configured of a material that has a refractive index (n) of 1.3-2.0 (inclusive) at a wavelength of 405 nm and an extinction coefficient (k) of not more than 0.3.
Inventors:
FURUYA KAZUYUKI (JP)
SUZUKI MASARU (JP)
SUZUKI MASARU (JP)
Application Number:
PCT/JP2010/059420
Publication Date:
December 09, 2010
Filing Date:
June 03, 2010
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
FURUYA KAZUYUKI (JP)
SUZUKI MASARU (JP)
FURUYA KAZUYUKI (JP)
SUZUKI MASARU (JP)
International Classes:
B29C59/04; B29C33/38
Domestic Patent References:
| WO2009093700A1 | 2009-07-30 |
Foreign References:
| JP2007229996A | 2007-09-13 | |||
| JP2005153223A | 2005-06-16 | |||
| JP2003251634A | 2003-09-09 | |||
| JPH0326527A | 1991-02-05 | |||
| JP2006116826A | 2006-05-11 | |||
| US5259926A | 1993-11-09 | |||
| US5772905A | 1998-06-30 | |||
| JP2005238719A | 2005-09-08 | |||
| JP2006005022A | 2006-01-05 | |||
| JP2007144995A | 2007-06-14 | |||
| JP2007258419A | 2007-10-04 | |||
| JP2007507725A | 2007-03-29 | |||
| JP2009136700A | 2009-06-25 |
Other References:
See also references of EP 2439050A4
HUA TAN; ANDREW GIBERTSON; STEPHEN Y. CHOU: "Roller nanoinprint lithography", J. VAC. SCI. TECHNOL., vol. 16, no. 6, 1998, pages 3926
"Nanoimprint application casebook", JOHOKIKO CO., LTD., pages: 611 - 612
YUUKI JOSHIMA, JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 43, no. 6B, 2004, pages 4031 - 4035
"Saishin resist material handbook", JOHOKIKO CO., LTD.
"Photopolymer handbook", KOGYO CHOSAKAI PUBLISHING CO., LTD.
HUA TAN; ANDREW GIBERTSON; STEPHEN Y. CHOU: "Roller nanoinprint lithography", J. VAC. SCI. TECHNOL., vol. 16, no. 6, 1998, pages 3926
"Nanoimprint application casebook", JOHOKIKO CO., LTD., pages: 611 - 612
YUUKI JOSHIMA, JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 43, no. 6B, 2004, pages 4031 - 4035
"Saishin resist material handbook", JOHOKIKO CO., LTD.
"Photopolymer handbook", KOGYO CHOSAKAI PUBLISHING CO., LTD.
Attorney, Agent or Firm:
AOKI, HIROYOSHI (JP)
Hiroyoshi Aoki (JP)
Hiroyoshi Aoki (JP)
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