Title:
TRANSPORTATION MECHANISM, TRANSPORTATION METHOD, AND PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2013/179904
Kind Code:
A1
Abstract:
A transportation mechanism (151) disposed in an atmospheric transportation chamber (50) and used to transport a workpiece (W), transportation mechanism being characterized in being provided with: a transportation arm (154) having at least one joint (ma, mb, mc) and capable of moving about the joint; a pick (P) attached to the distal end part of the transportation arm, the workpiece being placed on the pick (P); a lid body (C) attached to the transportation arm, the lid body being capable of covering the workpiece placed on the pick; and a gas supply part (155) for supplying dry air or an inert gas into the lid body.
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Inventors:
WAKABAYASHI SHINJI (JP)
Application Number:
PCT/JP2013/063673
Publication Date:
December 05, 2013
Filing Date:
May 16, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/677; H01L21/205; H01L21/3065
Foreign References:
| JP2008258188A | 2008-10-23 | |||
| JP2003092335A | 2003-03-28 | |||
| JP2003282666A | 2003-10-03 | |||
| JPH04243741A | 1992-08-31 | |||
| JP2008053550A | 2008-03-06 | |||
| JP2009170740A | 2009-07-30 | |||
| JP2001308005A | 2001-11-02 | |||
| JPH09330972A | 1997-12-22 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
Tadashige Ito (JP)
Tadashige Ito (JP)
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