Title:
TREATMENT LIQUID FEEDING SYSTEM, TREATMENT LIQUID FEEDING DEVICE, AND CARRIER STORAGE DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/088189
Kind Code:
A1
Abstract:
A treatment liquid feeding system, provided with: a treatment liquid feeding device 10 having carrier-housing parts 12 for housing a carrier 70, bottle-housing parts 13 for housing a treatment liquid bottle 80 removed from a carrier 70, liquid feed parts 14 for delivering a treatment liquid to substrate treatment devices 90 from a treatment liquid bottle 80, and a transportation unit 15; and a control device configured to control the transportation unit 15 so as to remove a treatment liquid bottle 80 from the carrier 70 of a carrier-housing part 12 and transport the treatment liquid bottle 80 to a bottle-housing part 13, control the transportation unit 15 so as to transport a treatment liquid bottle 80 to a liquid feed part 14, and control the transportation unit 15 so as to house a treatment liquid bottle 80 in the carrier 70 of a carrier-housing part 12.
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Inventors:
HASHIMOTO KAZUYA (JP)
AKADA HIKARU (JP)
AKADA HIKARU (JP)
Application Number:
PCT/JP2018/040567
Publication Date:
May 09, 2019
Filing Date:
October 31, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/027
Foreign References:
| JP2015076473A | 2015-04-20 | |||
| JP2015079875A | 2015-04-23 | |||
| JP2015035462A | 2015-02-19 | |||
| JP2016066784A | 2016-04-28 | |||
| JPH11342360A | 1999-12-14 | |||
| JP2000031000A | 2000-01-28 | |||
| KR20040013837A | 2004-02-14 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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