TRIODE-TYPE IONIZATION VACUUM GAUGE

Title:

TRIODE-TYPE IONIZATION VACUUM GAUGE

Document Type and Number:

WIPO Patent Application WO/2016/139894

Kind Code:

A1

Abstract:

Provided is a triode-type ionization vacuum gauge whereby the effect of particles emitted from the surface of an ion collector can be minimized and the pressure of a measurement object can be measured without measurement error. A triode-type ionization vacuum gauge IG is provided with a filament 2, a grid 3 arranged on the periphery of the filament and having a cylindrical outline, and a cylindrical ion collector 4 arranged on the periphery of the grid so as to be concentric therewith. The present invention is configured so that the length L2 of the ion collector in a bus-line direction is set to a range of 6% to 80% of the length L1 of the grid in the bus-line direction, and particle emission regions at both ends in the bus-line direction of the ion collector are omitted.

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Inventors:

MIYASHITA TAKESHI (JP)
NAKAJIMA TOYOAKI (JP)
FUKUHARA MASAHIRO (JP)

Application Number:

PCT/JP2016/000698

Publication Date:

September 09, 2016

Filing Date:

February 10, 2016

Export Citation:

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Assignee:

ULVAC INC (JP)

International Classes:

G01L21/32; H01J41/04

Foreign References:

JP2013072694A

2013-04-22

Attorney, Agent or Firm:

SEIGA PATENT AND TRADEMARK CORPORATION (JP)
SEIGA Patent and Trademark Corporation (JP)

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