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Patent Searching and Data


Title:
TRIODE-TYPE IONIZATION VACUUM GAUGE
Document Type and Number:
WIPO Patent Application WO/2016/139894
Kind Code:
A1
Abstract:
Provided is a triode-type ionization vacuum gauge whereby the effect of particles emitted from the surface of an ion collector can be minimized and the pressure of a measurement object can be measured without measurement error. A triode-type ionization vacuum gauge IG is provided with a filament 2, a grid 3 arranged on the periphery of the filament and having a cylindrical outline, and a cylindrical ion collector 4 arranged on the periphery of the grid so as to be concentric therewith. The present invention is configured so that the length L2 of the ion collector in a bus-line direction is set to a range of 6% to 80% of the length L1 of the grid in the bus-line direction, and particle emission regions at both ends in the bus-line direction of the ion collector are omitted.

Inventors:
MIYASHITA, Takeshi (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
NAKAJIMA, Toyoaki (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
FUKUHARA, Masahiro (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
Application Number:
JP2016/000698
Publication Date:
September 09, 2016
Filing Date:
February 10, 2016
Export Citation:
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Assignee:
ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
International Classes:
G01L21/32; H01J41/04
Foreign References:
JP2013072694A2013-04-22
Attorney, Agent or Firm:
SEIGA PATENT AND TRADEMARK CORPORATION (9th Fl, Saisho Bldg. 1-14, Nishi-Gotanda 8-chome, Shinagawa-k, Tokyo 31, 〒1410031, JP)
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