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Title:
TUNGSTEN HEXAFLUORIDE PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/123771
Kind Code:
A1
Abstract:
The present invention provides a method for producing tungsten hexafluoride by reacting tungsten with a fluorine-containing gas at a temperature of 800°C or higher. This method can increase the amount produced per reaction vessel compared to conventional techniques in which tungsten hexafluoride is obtained from metallic tungsten and a fluorine-containing gas while controlling the reaction temperature to 400°C or lower. The reaction vessel is preferably equipped with a coolant jacket for maintaining the inner wall temperature of the reaction vessel at 400°C or lower.

Inventors:
NAGATOMO MASAKIYO (JP)
YAO AKIFUMI (JP)
UESHIMA SHUHEI (JP)
KIKUCHI AKIOU (JP)
Application Number:
PCT/JP2018/037134
Publication Date:
June 27, 2019
Filing Date:
October 04, 2018
Export Citation:
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Assignee:
CENTRAL GLASS CO LTD (JP)
International Classes:
C01G41/04
Foreign References:
KR20070051400A2007-05-18
JPH01234303A1989-09-19
JP2010105910A2010-05-13
CN106587159A2017-04-26
CN101070189A2007-11-14
US4421727A1983-12-20
Attorney, Agent or Firm:
KOBAYASHI, Hiromichi et al. (JP)
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