TUNING-FORK VIBRATOR AND METHOD FOR MANUFACTURING THE SAME AND ANGULAR SPEED SENSOR

WIPO Patent Application WO/2010/026817

A1

Provided is a tuning-fork vibrator exhibiting good insulation reliability at the time of mounting on a circuit board, and having a high vibrator sensitivity and a high S/N ratio. A piezoelectric vibrator (70, 72) includes a tuning-fork vibrator (78) having a base (74) and legs (76a, 76b).  The piezoelectric vibrator (70, 72) is formed as a laminate of two piezoelectric substrates (80, 82), an intermediate electrode (84), surface electrodes (86, 88, 90), and a whole surface electrode (94).  The surface electrodes (86, 88, 90) are divided by division portions (92a, 92b) extending from the base (74) to the legs (76a, 76b).  The division portions (92a, 92b) are formed wider at portions joining to a circuit board than at the other portions.  The division portions (92a, 92b) are formed by dividing an electrode formed on the whole surface of a piezoelectric plate constituting the vibrator (78) by means of a dicer, or by dividing the electrode by means of laser irradiation or etching.

OGURI SHINYA (JP)
TABOTA JUN (JP)
KOIKE MASATO (JP)
KIYOHARA TOMOHIKO (JP)

PCT/JP2009/060738

March 11, 2010

June 12, 2009

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MURATA MANUFACTURING CO (JP)
OGURI SHINYA (JP)
TABOTA JUN (JP)
KOIKE MASATO (JP)
KIYOHARA TOMOHIKO (JP)

G01C19/5607; G01C19/5628; H01L41/22; H01L41/29; H01L41/311; H03H9/02; H03H9/19; H03H9/215

JP2008157856A	2008-07-10
JP2007263775A	2007-10-11
JP2008014894A	2008-01-24
JP3969459B1	2007-09-05
JP2004061486A	2004-02-26
JP2000249560A	2000-09-14
JP2006194818A	2006-07-27
JPH10311727A	1998-11-24

OKADA, MASAHIRO (JP)
Zenkei Okada (JP)

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