Title:
ULTRASONIC TRANSDUCER ELEMENT, METHOD FOR MANUFACTURING SAME, AND ULTRASONIC IMAGE PICKUP DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/194208
Kind Code:
A1
Abstract:
This ultrasonic transducer element is configured by being provided with: a substrate; a lower electrode formed on a first main surface of the substrate; a first insulating film formed on the lower electrode; a first cavity layer formed on the first insulating film; a second insulating film formed on the first cavity layer; an upper electrode, which is formed on the second insulating film, and is disposed at a position overlapping the first cavity layer when viewed from the upper surface; a third insulating film formed on the upper electrode; a second cavity layer formed on the third insulating film; a fourth insulating film formed on the second cavity layer; a fixed section configured from the second to fourth insulating films surrounding the outer periphery of the first cavity layer when viewed from the upper surface of the first main surface of the substrate; a movable section, which is a membrane region further toward the inside than the second cavity layer, said membrane being configured from the upper electrode and the second to fourth insulating films formed on the first cavity layer; and a first connecting section, and a second connecting section laminated by being separated from the first connecting section, as connecting sections that connect the movable section and the fixed section to each other, said connecting sections being configured from the second to fourth insulating films.
Inventors:
HASEGAWA HIROAKI (JP)
TAKEZAKI TAIICHI (JP)
MACHIDA SHUNTARO (JP)
RYUZAKI DAISUKE (JP)
TAKEZAKI TAIICHI (JP)
MACHIDA SHUNTARO (JP)
RYUZAKI DAISUKE (JP)
Application Number:
PCT/JP2015/066236
Publication Date:
December 08, 2016
Filing Date:
June 04, 2015
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H04R19/00; H03H9/24; H04R31/00
Domestic Patent References:
| WO2007046180A1 | 2007-04-26 | |||
| WO2014103334A1 | 2014-07-03 |
Foreign References:
| JP2009182838A | 2009-08-13 | |||
| JP2011507561A | 2011-03-10 |
Other References:
See also references of EP 3306952A4
Attorney, Agent or Firm:
SEIRYO I. P. C. (JP)
青稜 patent business corporation (JP)
青稜 patent business corporation (JP)
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