Title:
ULTRASONIC TRANSDUCER, METHOD FOR MANUFACTURING SAME, AND ULTRASONIC INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/159427
Kind Code:
A1
Abstract:
Provided are: a structure whereby an increase of a drive voltage in a capacitive ultrasonic transducer can be suppressed, and an ultrasonic transmission sound pressure of a CMUT can be increased; and a method for manufacturing the structure. The present invention is characterized in that capacitive ultrasonic transducer cells are laminated such that, when viewed from an upper surface of a first main surface of a substrate, hollow layer regions of all the lower layer ultrasonic transducer cells are included in a hollow layer region of the topmost layer ultrasonic transducer cell.
Inventors:
MACHIDA SHUNTARO (JP)
RYUZAKI DAISUKE (JP)
RYUZAKI DAISUKE (JP)
Application Number:
PCT/JP2014/061048
Publication Date:
October 22, 2015
Filing Date:
April 18, 2014
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
H04R19/00; G01N29/06; H04R31/00
Foreign References:
| US6558330B1 | 2003-05-06 | |||
| JP2009194934A | 2009-08-27 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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