Title:
ULTRASOUND TRANSDUCER, DISTANCE MEASUREMENT DEVICE, AND ULTRASOUND TRANSDUCER MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/219716
Kind Code:
A1
Abstract:
An ultrasound transducer (1) includes a vibration plate (2) capable of generating a sound wave and a cover part (CP) connected to the vibration plate (2). The vibration plate (2) and the cover part (CP) are monolithically formed using a MEMS. The cover part (CP) has a void (3) and a tone hole (4) communicating with the void (3). The void (3) and the tone hole (4) constitute a Helmholtz resonator. The equivalent mass of the vibration plate (2) is greater than the equivalent mass of the Helmholtz resonator.
Inventors:
KONNO NOBUAKI (JP)
HIRATA YOSHIAKI (JP)
KAJIYAMA YOSHITAKA (JP)
HIRATA YOSHIAKI (JP)
KAJIYAMA YOSHITAKA (JP)
Application Number:
PCT/JP2021/015311
Publication Date:
October 20, 2022
Filing Date:
April 13, 2021
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H04R1/28; H04R17/00
Domestic Patent References:
| WO2013122048A1 | 2013-08-22 |
Foreign References:
| JP2005051689A | 2005-02-24 | |||
| CN111001553A | 2020-04-14 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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