Title:
USE OF OPTICAL FOURIER TRANSFORM FOR DIMENSIONAL CONTROL IN MICROELECTRONICS
Document Type and Number:
WIPO Patent Application WO2005026707
Kind Code:
A3
Abstract:
The invention concerns a device for measuring dimensional or structural characteristics of an object, comprising: means (2) for forming an image of the optical Fourier transform of an elementary surface of the object in the image focal plane; processing means (26) for producing data concerning at least one dimensional and/or structural characteristic of the object based on the data supplied by the detecting means.
Inventors:
PETIT JEROME (FR)
CHATON PATRICK (FR)
GRAND GILLES (FR)
LEROUX THIERRY (FR)
CHATON PATRICK (FR)
GRAND GILLES (FR)
LEROUX THIERRY (FR)
Application Number:
PCT/FR2004/050443
Publication Date:
June 09, 2005
Filing Date:
September 17, 2004
Export Citation:
Assignee:
COMMISSARIAT ENERGIE ATOMIQUE (FR)
PETIT JEROME (FR)
CHATON PATRICK (FR)
GRAND GILLES (FR)
LEROUX THIERRY (FR)
PETIT JEROME (FR)
CHATON PATRICK (FR)
GRAND GILLES (FR)
LEROUX THIERRY (FR)
International Classes:
G01B11/06; G01B11/24; G01B11/30; G01N21/956; (IPC1-7): G01N21/956; G01B11/24; G01B11/06; G01B11/30
Foreign References:
| FR2749388A1 | 1997-12-05 | |||
| FR2613830A1 | 1988-10-14 | |||
| US6020957A | 2000-02-01 | |||
| US5428442A | 1995-06-27 | |||
| US4735487A | 1988-04-05 | |||
| US5241369A | 1993-08-31 |
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