X-RAY DIFFRACTION MICROSCOPE AND X-RAY DIFFRACTION MEASUREMENT METHOD USING X-RAY DIFFRACTION MICROSCOPE

WIPO Patent Application WO/2005/026708

A1

There is provided an X-ray diffraction microscope (1) including an X-ray generation device (2), a sample stage (3), a collimator (4) as angle divergence suppression means, a 2-dimensional X-ray detector (5) having energy resolution, an image processing device, and an image recording/display device (6). A sample (7) and the 2-dimensional X-ray detector (5) are set as near as possible from each other via the collimator (4) so as to suppress the angle divergence of the diffracted X-ray and measure the diffracted X-ray without moving the 2-dimensional X-ray detector (5) and the sample stage (3), i.e., in a still state, and convert it into an image. The X-ray diffraction measurement method using the X-ray diffraction microscope (1) enables acquisition of an image in an extremely short time and obtaining an image showing a difference when the sample is uneven or contains a different crystal structure or a set structure of different orientation.

SAKURAI KENJI (JP)
MIZUSAWA TAZUKO (JP)

PCT/JP2004/013497

March 24, 2005

September 09, 2004

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NAT INST FOR MATERIALS SCIENCE (JP)
SAKURAI KENJI (JP)
MIZUSAWA TAZUKO (JP)

G01N23/20; G01T7/00; G21K1/06; G21K7/00; (IPC1-7): G01N23/207; G21K7/00

JPS62106352A	1987-05-16
JP2001281174A	2001-10-10
JPH04301800A	1992-10-26
JP2000292379A	2000-10-20
JP2000055842A	2000-02-25

CHIKAURA Y. ET AL.: "Polycrystal scattering topography", JOURNAL OF APPLIED CRYSTALLOGRAPHY, vol. 15, no. 1, 1 February 1982 (1982-02-01), pages 48 - 54, XP000886944
See also references of EP 1672361A4

Nishizawa, Toshio (11-1 Minami-Aoyama 6-chom, Minato-ku Tokyo, JP)

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