Title:
USE OF VAPOR-DEPOSITED CONFORMAL COATINGS IN MICROFLUIDIC STRUCTURES
Document Type and Number:
WIPO Patent Application WO2001087768
Kind Code:
A3
Abstract:
This invention relates to methods and apparatus for performing microanalytic and microsynthetic analyses and procedures. The invention particularly provides microsystem platforms comprising microfluidics components wherein the interior surfaces of the components comprise a conformal coating of parylene.
Inventors:
SHEPPARD NORMAN F JR (US)
CARVALHO BRUCE (US)
CARVALHO BRUCE (US)
Application Number:
PCT/US2001/015805
Publication Date:
April 18, 2002
Filing Date:
May 15, 2001
Export Citation:
Assignee:
TECAN TRADING AG (CH)
SHEPPARD NORMAN F JR (US)
CARVALHO BRUCE (US)
SHEPPARD NORMAN F JR (US)
CARVALHO BRUCE (US)
International Classes:
B01L3/00; C12Q1/68; C12Q1/686; B81B1/00; (IPC1-7): B81C1/00; B32B31/00; B01J19/00; B01L3/00
Domestic Patent References:
WO1999033559A1 | 1999-07-08 |
Foreign References:
EP0736757A1 | 1996-10-09 | |||
US5922537A | 1999-07-13 | |||
US5888884A | 1999-03-30 |
Download PDF:
Previous Patent: MICRO-ELECTROCMECHAMICAL SENSOR (MEMS) RESONATOR
Next Patent: METHOD AND DEVICE FOR THE REDUCTION OF NITROGEN PROTOXIDE
Next Patent: METHOD AND DEVICE FOR THE REDUCTION OF NITROGEN PROTOXIDE