Title:
UV-RAY IRRADIATOR
Document Type and Number:
WIPO Patent Application WO/2006/009152
Kind Code:
A1
Abstract:
A UV-ray irradiator comprising a UV-ray irradiating section (12) having a plurality of UV-ray emitting diodes (21) arranged on a substrate (20) and disposed oppositely to a body being irradiated, i.e. a semiconductor wafer, applied with a protective sheet S through a UV-curing adhesive layer. The UV-ray emitting diodes (21) are arranged, at a constant interval, on a plurality of lines L1 substantially perpendicularly intersecting the direction of relative movement with respect to the wafer such that a part of the UV-ray emitting diodes (21) in the adjacent row is located between the adjacent UV-ray emitting diodes (21) in each row.
Inventors:
KAWASAKI KIMIHIKO (JP)
KOBAYASHI KENJI (JP)
KOBAYASHI KENJI (JP)
Application Number:
PCT/JP2005/013267
Publication Date:
January 26, 2006
Filing Date:
July 20, 2005
Export Citation:
Assignee:
LINTEC CORP (JP)
KAWASAKI KIMIHIKO (JP)
KOBAYASHI KENJI (JP)
KAWASAKI KIMIHIKO (JP)
KOBAYASHI KENJI (JP)
International Classes:
H01L23/50; H01L33/00; (IPC1-7): H01L21/68; H01L33/00
Foreign References:
| JPS62189112A | 1987-08-18 | |||
| JP2003145812A | 2003-05-21 | |||
| JP2003098677A | 2003-04-04 |
Attorney, Agent or Firm:
Yamaguchi, Yoshio (Izumi Building 4-17, Tsurumaki 1-chom, Tama-shi Tokyo 34, JP)
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