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Title:
VACUUM DEVICE AND ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/193791
Kind Code:
A1
Abstract:
This vacuum device is provided with a first chamber, a second chamber connected with the first chamber via an opening part, and a depressurizing part that depressurizes the first chamber and the second chamber. The first chamber is provided with a valve that can move between a first position of facing the opening part and a second position of not facing the opening part, and a drive unit that is secured to the first chamber and that causes the valve in the first position to move in the direction of the opening part to open and close the opening part.

Inventors:
HOSOI KOSUKE (JP)
INUI KIMITAKA (JP)
Application Number:
PCT/JP2018/047284
Publication Date:
October 10, 2019
Filing Date:
December 21, 2018
Export Citation:
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Assignee:
SHIMADZU CORP (JP)
International Classes:
F16K51/02; G01N27/62; H01J49/24
Domestic Patent References:
WO2017085874A12017-05-26
Foreign References:
JP2016115565A2016-06-23
JP2016115565A2016-06-23
JP2018070671A2018-05-10
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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