VACUUM FEEDTHROUGH

WIPO Patent Application WO/2012/121267

A1

A vacuum feedthrough (10A) has a pipe (11), a shaft (12) which is located within the space within the pipe (11), a magnet slider (13) which can slide on the outer peripheral surface of the pipe (11) in the longitudinal direction, and a magnet holder which is mounted to the rear end of the shaft (12). The vacuum feedthrough (10A) includes: a stationary holder (23) mounted at the front end of the space within the pipe (11) and retaining the shaft (12) at the center in the radial direction; and a movable holder (29) mounted to the rear end of the shaft (12) and retaining the shaft at the center in the radial direction. The stationary holder (23) has a support housing (35) provided with a slide bearing for slidably supporting the outer peripheral surface of the shaft (12). The movable holder (29) has: elastically deformable arms; rollers rollable in the longitudinal direction; and a tapered plug forcibly elastically deforming the arms toward the inner surface of the pipe and pressing the rollers against the inner peripheral surface of the pipe.

SASAKI TOMOAKI (JP)
CHIBA AKIO (JP)
SEKINO HIROYUKI (JP)
KASHIWABARA SADAO (JP)

PCT/JP2012/055743

September 13, 2012

March 07, 2012

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AVC CO LTD (JP)
SASAKI TOMOAKI (JP)
CHIBA AKIO (JP)
SEKINO HIROYUKI (JP)
KASHIWABARA SADAO (JP)

B25J18/04; B65G49/07; H01J37/16; H01J37/18; H01J37/20; H01L21/677

WO2009130011A1

2009-10-29

JPS63211643A	1988-09-02
JPH069054A	1994-01-18
JP2010070284A	2010-04-02
JPH0686342U	1994-12-13

KOBAYASHI YOSHITAKA (JP)
Yoshitaka Kobayashi (JP)

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