Title:
VACUUM PUMP, VACUUM PUMP CONTROL DEVICE, AND REMOTE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/196558
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump, a vacuum pump control device, and a remote control device with which it is possible to reduce the work load on users and field service engineer. [Solution] A vacuum pump 10 comprises a turbo-molecular pump 100 that discharges gas inside a semiconductor manufacturing device X, and a control device 200 that performs control on the turbo-molecular pump 100. The control device 200 comprises a remote signal reception means that receives a command signal from a remote control device 300 that remotely controls the turbo-molecular pump 100, and changes settings related to the operating specifications of the turbo-molecular pump 100 on the basis of the command signal received by the remote signal reception means.
Inventors:
HASHIMOTO MASAYUKI (JP)
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
Application Number:
PCT/JP2022/010896
Publication Date:
September 22, 2022
Filing Date:
March 11, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2019188732A1 | 2019-10-03 | |||
| WO2021060003A1 | 2021-04-01 |
Foreign References:
| JP2007303420A | 2007-11-22 | |||
| JP2009009786A | 2009-01-15 | |||
| JP2010059908A | 2010-03-18 | |||
| JP5782378B2 | 2015-09-24 |
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