Title:
VACUUM PUMP CONTROLLER AND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2021/166816
Kind Code:
A1
Abstract:
[Problem] To obtain a vacuum pump controller that satisfactorily operates a vacuum pump at a prescribed rotation frequency range, and to obtain a vacuum pump. [Solution] A signal processing unit 31 generates a current command value on the basis of a sensor signal acquired from displacement sensors 11H and 11B, which detect the displacement of a rotor shaft 3c of the vacuum pump. A drive circuit 32 conducts a current corresponding to the current command value to electromagnets 12H and 12B, which adjust displacement of the rotor shaft 3c of the vacuum pump. When the rotation frequency Ω of the rotor shaft 3c is within a specific rotation frequency range a displacement restriction unit 34 restricts the displacement of the rotor shaft 3c to a displacement caused by whirling around the center of inertia.
Inventors:
YOKOZUKA KATSUHISA (JP)
YAMAMOTO MASAYUKI (JP)
YAMAMOTO MASAYUKI (JP)
Application Number:
PCT/JP2021/005365
Publication Date:
August 26, 2021
Filing Date:
February 12, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F16C32/04; F04D19/04
Foreign References:
| JP2001027238A | 2001-01-30 | |||
| JPH04116014U | 1992-10-15 | |||
| JPH01137302A | 1989-05-30 | |||
| JP2012163052A | 2012-08-30 | |||
| JPH06193633A | 1994-07-15 | |||
| JP2001027238A | 2001-01-30 |
Other References:
See also references of EP 4108946A4
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