Title:
VACUUM PUMP AND ELECTROMAGNET UNIT USED FOR VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2021/039478
Kind Code:
A1
Abstract:
[Problem] To provide: an electromagnet unit which prevents a displacement sensor from being affected by noise and can be installed in a space-saving manner; and a vacuum pump provided with said electromagnet unit. [Solution] This electromagnet unit 50 comprises: a radial electromagnet 51 that controls a shaft 21 to be at a predetermined position; a radial sensor 53 that detects the position of the shaft 21; a printed board 55 which is interposed between the radial electromagnet 51 and the radial sensor 53 and is provided with a sensor wiring pattern 56 that connects coils 53c of two mutually corresponding radial sensors 53, 53, and an electromagnet wiring pattern 57 that connects coils 51c of two mutually corresponding radial electromagnets 51, 51. The sensor wiring pattern 56 and the electromagnet wiring pattern 57 are disposed so as not to overlap when viewed in an axial direction A.
Inventors:
SHI YONGWEI (JP)
Application Number:
PCT/JP2020/031033
Publication Date:
March 04, 2021
Filing Date:
August 17, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2018193944A1 | 2018-10-25 |
Foreign References:
| JP2008182823A | 2008-08-07 | |||
| JP2018151378A | 2018-09-27 | |||
| JPH0414815U | 1992-02-06 |
Other References:
See also references of EP 4019781A4
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