Title:
VACUUM PUMP AND VACUUM EXHAUST SYSTEM WHICH USES SAME
Document Type and Number:
WIPO Patent Application WO/2022/075229
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump suitable for improving the compression ratio and uniformity of pressure inside a chamber, and a vacuum exhaust system which uses said pump. [Solution] A vacuum pump P1 equipped with a cylindrical inner housing 1, a cylindrical stator 2 positioned outside the inner housing, a cylindrical shaft 3 which is rotatably positioned between the inner housing and the stator, a motor MT for driving so as to rotate the shaft around the axial center thereof, multiple stages of rotor blades 4A, 4B positioned on the outer-circumferential surface of the shaft, and a cylindrical outer housing 7 which has an intake port 5 and an exhaust port 6 and is provided to the outside of the multiple stages of rotor blades, wherein a gap between the outer-circumferential surface of the inner housing 1 and the inner-circumferential surface of the shaft 3 is provided with a sealing mechanism 8 for inhibiting the inflow of gas into said gap.
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Inventors:
SAKAGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2021/036489
Publication Date:
April 14, 2022
Filing Date:
October 01, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2020051317A | 2020-04-02 | |||
| JP2005520090A | 2005-07-07 | |||
| JP2002349464A | 2002-12-04 | |||
| JP2005207275A | 2005-08-04 | |||
| JP2000027789A | 2000-01-25 | |||
| JP2000183037A | 2000-06-30 |
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