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Title:
VACUUM PUMP AND ROTARY CYLINDRICAL BODY PROVIDED TO VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/075228
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that makes it possible to reduce stress without lowering the number of rotations of a rotary cylindrical body (rotor) and to improve exhaust performance, and a rotary cylindrical body that is provided to the vacuum pump. [Solution] On the exhaust port side in the lower part of a cylindrical part (rotary cylindrical body) that is provided to a vacuum pump, provided is an extension part that extends to the downstream side of a fixation side component of a thread groove exhaust element. In the extension part, stress occurring on the inner diameter side during the rotation decreases as the outer diameter decreases. Therefore, with a configuration having a diameter-decreasing part, it is possible to reduce stress occurring on the inner diameter side of the cylindrical part without lowering the number of rotations of the rotor (such as the cylindrical part). By employing a gradually-decreasing-diameter structure in the extension part, it is possible to reduce concentration of stress in the diameter-decreasing part.

Inventors:
MIWATA TOORU (JP)
SAKAGUCHI YOSHIYUKI (JP)
TAKAI YOSHIYUKI (JP)
SHIBATA YASUHIRO (JP)
Application Number:
PCT/JP2021/036488
Publication Date:
April 14, 2022
Filing Date:
October 01, 2021
Export Citation:
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Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
WO2012077411A12012-06-14
Foreign References:
JP2018035718A2018-03-08
JPH01113191U1989-07-31
JPH10246197A1998-09-14
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