Title:
VACUUM PUMP, AND FIXED COMPONENT OF SCREW GROOVE PUMP UNIT OF SAME
Document Type and Number:
WIPO Patent Application WO/2020/230799
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump suitable for preventing backflow of particles from the vacuum pump to a vacuum chamber side. [Solution] A vacuum pump P1 is provided with a turbo molecular pump unit PT which vents gas molecules by means of rotating blades 7 and fixed blades 8, and a screw groove pump unit PS which is provided downstream of the turbo molecular pump unit, and which vents the gas molecules by means of a screw groove flow passage R formed by a cylindrical rotating component (cylindrical portion 6) and a cylindrical fixed component (screw groove pump unit stator 9) provided at the outer periphery of the rotating component, wherein a rebound preventing means J for preventing particles rebounding from the screw groove pump unit toward the turbo molecular pump unit is provided downstream of the turbo molecular pump unit.
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Inventors:
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
YAMAGUCHI TOSHIKI (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
YAMAGUCHI TOSHIKI (JP)
Application Number:
PCT/JP2020/019034
Publication Date:
November 19, 2020
Filing Date:
May 12, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2009153874A1 | 2009-12-23 | |||
| WO2011070856A1 | 2011-06-16 |
Foreign References:
| JP2006144590A | 2006-06-08 | |||
| JP2018178733A | 2018-11-15 | |||
| JP2004076708A | 2004-03-11 |
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