Title:
VACUUM PUMP, AND LINKED-TYPE SCREW GROOVE SPACER
Document Type and Number:
WIPO Patent Application WO/2020/241521
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a vacuum pump with which it is possible to prevent a deterioration in the exhaust performance of the vacuum pump even if a linked-type screw groove spacer is fastened using fixing bolts. A linked-type screw groove spacer according to an embodiment of the present invention has a structure linking a Siegbahn pump portion and a screw groove pump portion. When fastening the linked-type screw groove spacer, a countersunk hole is provided in advance in an exhaust flow passage portion, and is fastened to a base using fixing bolts. In this way, head portions of the fixing bolts do not protrude into an exhaust flow passage, and the head portions of the fixing bolts do not become a resistance to exhaust gas. A deterioration in the exhaust performance of the vacuum pump can thus be suppressed.
Inventors:
SAEGUSA KENGO (JP)
YOSHIHARA NAHOKO (JP)
OHTACHI YOSHINOBU (JP)
YOSHIHARA NAHOKO (JP)
OHTACHI YOSHINOBU (JP)
Application Number:
PCT/JP2020/020400
Publication Date:
December 03, 2020
Filing Date:
May 22, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2017086135A1 | 2017-05-26 |
Foreign References:
| JP2018178733A | 2018-11-15 | |||
| JP2015148162A | 2015-08-20 | |||
| JP2002021775A | 2002-01-23 | |||
| JP2000205183A | 2000-07-25 |
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