VACUUM PUMP AND PROTECTION MEMBER PROVIDED IN VACUUM PUMP

WIPO Patent Application WO/2020/241522

A1

Provided are: a vacuum pump in which sparking is eliminated in the event of contact between a rotating component and a fixed component, making it possible to prevent an explosive reaction in a vacuum container; and a protecting member provided in the vacuum pump . Non-metal protecting members (1a to 1e) are formed circumferentially on the heads of screw threads (131a to 131e) of a threaded spacer (131) disposed in a gas flow path with a narrow gap therebetween. Similarly, a protecting member (1x) is circumferentially formed on an inner peripheral surface side of a fixed blade spacer (125x) opposing a tip-end of a rotating blade (102x) having a narrow gas flow path gap. The protecting members are formed of a non-metal having a sufficient thickness to prevent metal materials of base material from coming into contacting with each other in the event of the rotating blade (102) and a stationary portion making contact. When the rotating blade (102) and the stationary portion came into contact, the protecting members make contact earlier and are ground, preventing the metals of the base material from being exposed and making contact. In addition, the protecting members have a certain hardness such that, together with an object repelling function, the metals of the base material are more effectively prevented from being exposed and making contact.

ENOMOTO YOSHIHIRO (JP)
KABASAWA TAKASHI (JP)

PCT/JP2020/020401

December 03, 2020

May 22, 2020

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EDWARDS JAPAN LTD (JP)

F04D19/04

JP2005180265A	2005-07-07
JPH05240188A	1993-09-17
JPS5525658U	1980-02-19
JP2007170537A	2007-07-05
JPH10252683A	1998-09-22
JPS5376372U	1978-06-26

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