Title:
VACUUM PUMP, ROTOR, AND WASHER
Document Type and Number:
WIPO Patent Application WO/2021/010196
Kind Code:
A1
Abstract:
[Problem] To provide: a vacuum pump and a washer capable of reducing the vibration of a rotor; and a rotor capable of reducing the vibration. [Solution] According to the present invention, when the moment of inertia ratio, which is the ratio of the moment of inertia around the z-axis to the moment of inertia around the x-axis or y-axis, is greater than 1, a natural frequency ω2 does not match and deviate from a rotation frequency Ωz. When the natural frequency ω2 matches the rotation frequency Ωz, the rotor vibrates, which in turn causes fatigue fracture of a rotor blade. When the rotor is increased in the radial direction of the rotation axis, the value of the moment of inertia ratio is set to a value larger than 1.
Inventors:
YOKOZUKA KATSUHISA (JP)
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
OHTACHI YOSHINOBU (JP)
MAEJIMA YASUSHI (JP)
TAKAADA TSUTOMU (JP)
Application Number:
PCT/JP2020/026285
Publication Date:
January 21, 2021
Filing Date:
July 03, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JPS4934089B1 | 1974-09-11 | |||
| JP2005083524A | 2005-03-31 | |||
| JP2005105846A | 2005-04-21 | |||
| JP2016118202A | 2016-06-30 | |||
| JP2012163052A | 2012-08-30 | |||
| JPS4934089B1 | 1974-09-11 |
Other References:
See also references of EP 3998407A4
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