Title:
VACUUM PUMP AND SEAL MEMBER FOR USE IN VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2020/195941
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump that has few parts and superior sealing properties. [Solution] The present invention is provided with: a plurality of stator blades 19 provided toward the center of an intake-side casing 14a; a rotor shaft 21 that is contained within the intake-side casing 14a and is rotatably supported; a plurality of rotor blades 20 radially provided at the periphery of the rotor shaft 21; a motor 16 for rotating the rotor shaft 21; and an annular seal member 41 that elastically deforms when subjected to through-thickness directional sandwiching force by the intake-side casing 14a and an exhaust-side casing 14b, and maintains air tightness between the intake-side casing 14a and the exhaust-side casing 14b, wherein the seal member has, in a cross section thereof, a deformation-promoting part formed in a recessed shape in an outer circumference part, and a seal part that is subjected to force at an eccentric position near the deformation-promoting part.
Inventors:
TAKAADA TSUTOMU (JP)
Application Number:
PCT/JP2020/011070
Publication Date:
October 01, 2020
Filing Date:
March 13, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04; F16J15/10
Domestic Patent References:
| WO2010016141A1 | 2010-02-11 |
Foreign References:
| JPS5045551U | 1975-05-08 | |||
| US9777806B2 | 2017-10-03 | |||
| JPS619644U | 1986-01-21 | |||
| JPS6113071B2 | 1986-04-11 |
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