VACUUM PUMP, CASING, AND INTAKE OPENING FLANGE

Title:

VACUUM PUMP, CASING, AND INTAKE OPENING FLANGE

Document Type and Number:

WIPO Patent Application WO/2020/195942

Kind Code:

A1

Abstract:

[Problem] To provide a vacuum pump that is configured by dividing an intake opening flange and a casing (outer tube) into two components and reducing the weight while maintaining the required strength, with the result that the manufacturing cost can be reduced. [Solution] A vacuum pump 1 is configured such that an intake opening flange 100 and a casing (outer tube) 2 are divided into separate members. The intake opening flange 100 uses a stainless steel material and the casing (outer tube) 2 uses an aluminum material. When the vacuum pump 1 is assembled the two members are fastened together with bolts and sealed with an O-ring to ensure the vacuum property. Thus, the weight of the vacuum pump 1 can be reduced while maintaining the strength of the intake opening flange 100.

Inventors:

YOSHIHARA NAHOKO (JP)
SAKAGUCHI YOSHIYUKI (JP)
OGAWA YOHEI (JP)

Application Number:

PCT/JP2020/011071

Publication Date:

October 01, 2020

Filing Date:

March 13, 2020

Export Citation:

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Assignee:

EDWARDS JAPAN LTD (JP)

International Classes:

F04D19/04

Domestic Patent References:

WO2008035497A1	2008-03-27
WO2006068014A1	2006-06-29

Foreign References:

JP2003003988A	2003-01-08
JP2017190744A	2017-10-19
JP2006037951A	2006-02-09
JPS6028298U	1985-02-26
JP2008075489A	2008-04-03
JP2015059426A	2015-03-30

Other References: