Title:
VACUUM PUMP, AND STATOR COMPONENT
Document Type and Number:
WIPO Patent Application WO/2021/230209
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump with which it is possible to prevent the generation of deposits in a flow path on the downstream side from a screw groove pump mechanism portion. [Solution] This vacuum pump is provided with a turbo molecular pump mechanism portion 17 including rotor blades 20 and stator blades 19, and, on the exhaust side of the turbo molecular pump mechanism portion 17, a screw groove pump mechanism portion 18 including a rotor cylindrical portion 23 formed integrally on the outer circumferential surface of a rotor 28, and including a helical screw groove portion 41 on a screw stator 24 facing the rotor cylindrical portion 23, wherein: by driving a rotor shaft 21, process gas sucked in from an intake port 27 is exhausted to the outside through an exhaust port 25; and in the screw groove pump mechanism portion 18, in order to prevent the process gas solidifying, inert gas having a temperature at least equal to a prescribed temperature is introduced from an introduction port provided in the screw stator 24.
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Inventors:
TAKAHASHI KATSUNORI (JP)
YOSHINO SHINICHI (JP)
YOSHINO SHINICHI (JP)
Application Number:
PCT/JP2021/017737
Publication Date:
November 18, 2021
Filing Date:
May 10, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2019120249A | 2019-07-22 | |||
| JP2008248754A | 2008-10-16 | |||
| JPH04127891U | 1992-11-20 | |||
| JP2007270742A | 2007-10-18 | |||
| GB2553766A | 2018-03-21 |
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