Title:
VACUUM PUMP AND VACUUM PUMP SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/049454
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump from which reaction byproducts can be removed without performing an overhaul. [Solution] This vacuum pump comprises: a motor 16 for rotating a rotor 28; a heater 48 capable of increasing in temperature; a base spacer 42 that holds the heater 48; a controller capable of switching the operation mode of the heater 48 between a normal operation mode and a cleaning operation mode and controlling the heater 48; and a storage unit that stores set temperature information pertaining to the heater 48. The storage unit stores at least first temperature information for the normal operation mode, specifically information about a set temperature at which the pump can be used without malfunction, and second temperature information for the cleaning operation mode, specifically information about a set temperature at which reaction byproducts generated in the normal operation mode can be reverted to a gaseous form. The temperature indicated by the second temperature information is higher than the temperature indicated by the first temperature information.
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Inventors:
ICHIHARA KOICHI (JP)
KABASAWA TAKASHI (JP)
KABASAWA TAKASHI (JP)
Application Number:
PCT/JP2020/033757
Publication Date:
March 18, 2021
Filing Date:
September 07, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2013119798A | 2013-06-17 | |||
| JP2010138741A | 2010-06-24 | |||
| JPH01247794A | 1989-10-03 | |||
| JP2016167513A | 2016-09-15 | |||
| JP2006017089A | 2006-01-19 | |||
| US20180233334A1 | 2018-08-16 | |||
| JP2011080407A | 2011-04-21 |
Other References:
See also references of EP 4030060A4
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